Lv7
4880 积分 2022-04-22 加入
Computation of transmission cross coefficients for pixelated illumination source
18天前
已关闭
Binary solution for optimization of pixelated EUV source using constrained mathematical programming
1个月前
已完结
Source optimization for less aggressive optical proximity correction in 0.55 NA logic single patterning
1个月前
已完结
The improved optical setup for Abbe-Porter experiment
1个月前
已关闭
Optical Lithography for Advanced Semiconductor Patterning
1个月前
已完结
Investigation of machine learning for dual OPC and assist feature printing optimization
2个月前
已完结
HiFiMO: a high-resolution flexible mask optimization framework with diffusion model
2个月前
已完结
Model-Driven Inverse Lithography Via Hypergraph Convolutional Neural Networks and its Experimental Demonstration
2个月前
已完结
Establishing fast, practical, full-chip ILT flows using machine learning
2个月前
已完结
Synthesizing ILT MB-SRAF using machine learning
3个月前
已完结
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