Lv7
5000 积分 2022-04-22 加入
MF-ILT: efficient gradient-driven inverse lithography technology with multi-scale adaptation and frequency-domain segmentation synergy
10天前
已完结
High-fidelity curvilinear SRAF method adopting distance-versus-angle-signature
15天前
已完结
Optimized mask design for inverse lithography via level-set normalized gradient descent
18天前
已完结
Freeform mask optimization using advanced image based M3D inverse lithography and 3D-NAND full chip opc application
18天前
已完结
EUV M3D parameter prediction of curvilinear mask patterns by convolutional neural networks
1个月前
已完结
FuILT-S: Full Chip ILT With Unified Boundary Healing and SRAF Co-Optimization
1个月前
已完结
Fundamental understanding and experimental verification of bright versus dark field imaging
1个月前
已完结
A tutorial on the adjoint method for inverse problems
1个月前
已完结
Linearized EUV mask optimization based on the adjoint method
1个月前
已完结
Mask space optimization (MSO) for ILT and SMO: reinforcement learning–driven recipe tuning
2个月前
已关闭
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