Lv21
120 积分 2025-01-19 加入
Surface property control for 193 nm immersion resist by addition of Si compound
4小时前
已完结
Fluoro-alcohol materials with tailored interfacial properties for immersion lithography
3个月前
已完结
Advances in Patterning Materials for 193 nm Immersion Lithography
3个月前
已完结
Control of Presentation of Functional Ultraviolet Absorbers to the Surface of Photoresist Polymers Using Low Surface Energy Polymers
3个月前
已完结
Advanced materials for 193 nm immersion lithography
3个月前
已完结
Design of Dual-Sensitive Functional Photoresist for UV Lithography
5个月前
已完结
The effects of the bottom anti-reflective coating with different baked temperatures and thicknesses on nanoscale patterns
7个月前
已完结
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