Lv42
708 积分 2025-01-08 加入
Micromirror array allocation algorithm based on deconvolution
15天前
已完结
Hybrid approach for the design of mirror array to produce freeform illumination sources in immersion lithography
15天前
已完结
Successful implementation of a MEMS micromirror array in a lithograpy illumination system
15天前
已完结
Design of a high-numerical-aperture extreme ultraviolet lithography illumination system
18天前
已完结
Configuration design for the variable pupil shaping unit of a photolithography machine
18天前
已关闭
Method of pupil shaping for off-axis illumination in optical lithography
1个月前
已完结
Microlens beam homogenizer for excimer laser processing
1个月前
已完结
Phase-coded microlens array for suppressing interference-lattice modulation in highly coherent beam homogenization
1个月前
已完结
Random Phasing of High-Power Lasers for Uniform Target Acceleration and Plasma-Instability Suppression
1个月前
已完结
A quality evaluation study for annular beams
2个月前
已关闭
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