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390 积分 2025-01-13 加入
High wet-etch resistance SiO2 films deposited by plasma-enhanced atomic layer deposition with 1,1,1-tris(dimethylamino)disilane
1个月前
已关闭
Sub-2 nm boron doping in silicon using novel ultra-thin SiO2 film produced by sol–gel dip coating as a capping layer
1个月前
已完结
Composition and Growth Mechanisms of a Boron Layer Formed Using the Molecular Layer Doping Process
1个月前
已完结
Interaction of tetraethoxysilane with OH-terminated SiO2 (0 0 1) surface: A first principles study
1个月前
已完结
Mechanisms for undesired nucleation on H-terminated Si and dimethylamino-trimethylsilane passivated SiO2 during TiO2 area-selective atomic layer deposition
1个月前
已完结
Aminosilane small molecule inhibitors for area-selective deposition: Study of substrate-inhibitor interfacial interactions
1个月前
已完结
Area-selective atomic layer deposition of Al2O3 on SiNx with SiO2 as the nongrowth surface
1个月前
已完结
Functionalization of the SiO2 Surface with Aminosilanes to Enable Area-Selective Atomic Layer Deposition of Al2O3
1个月前
已完结
Area-Selective Atomic Layer Deposition Using Si Precursors as Inhibitors
1个月前
已完结
Elucidating the surface chemistry of SiO2 and SiNx in hydrofluoric acid for area-selective atomic layer deposition of SiO2
1个月前
已完结
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