Lv3
370 积分 2023-09-08 加入
SAQP spacer merge and EUV self-aligned block decomposition at 28nm metal pitch on imec 7nm node
4个月前
已完结
Wafer-to-wafer hybrid bonding at 400-nm interconnect pitch
4个月前
已完结
Controlled Anisotropic Wetting by Plasma Treatment for Directed Self-Assembly of High-χ Block Copolymers
6个月前
已完结
Defect Rectification in High‐Density Patterns through Directed Self‐Assembly of Advanced Block Copolymer Architectures
6个月前
已完结
Up to 48× Density Multiplication Achieved by Directed Self-Assembly on Plasma-Trimmed Honeycomb Templates
6个月前
已完结
Square Array of Cylinders Formed in Linear–Bottlebrush–Linear Triblock Copolymers
7个月前
已完结
Block copolymer thin films
7个月前
已完结
Directed self-assembly of poly(styrene-b-vinyl acetate) block copolymers on chemical patterns for sub-10 nm nanopatterning via thermal annealing
8个月前
已完结
Review of Semiconductor Flash Memory Devices for Material and Process Issues
9个月前
已完结
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