Lv3
280 积分 2023-09-08 加入
Roughness study on line and space patterning with chemo-epitaxy directed self-assembly
2天前
待确认
Etch developments in response to DSA challenges
2天前
已完结
Wet etch process for high-resolution DSA patterning for advanced node DRAM
11天前
已完结
Ionic liquid mediated directed self-assembly of diblock/triblock copolymer thin films for advanced lithography
12天前
已完结
Directed self-assembly: PS-b-PMMA materials readiness and high-chi platforms for extended geometry scaling
12天前
已完结
Material and process optimization for EUV pattern rectification by DSA
12天前
已完结
Block Copolymer Nanopatterning for Nonsemiconductor Device Applications
28天前
已完结
Establishing a sidewall image transfer chemo-epitaxial DSA process using 193 nm immersion lithography
1个月前
已完结
Expanding DSA process window with atmospheric control
1个月前
已完结
In-line E-beam wafer metrology and defect inspection: the end of an era for image-based critical dimensional metrology? New life for defect inspection
2个月前
已完结
皖公网安备34019202002308
