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Chapter 6 Assessment of optical systems by means of point-spread functions
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Optical system for microscopic observation and strain measurement at high temperature
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<title>Beginning the design of a UV microscope objective</title>
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Modulation transfer function of a fish-eye lens based on the sixth-order wave aberration theory
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Theory of orthogonal aberrations and its use in lens design
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Köhler illumination analysis for high-resolution optical metrology using 193 nm light
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Angle resolved optical metrology
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Design of angle-resolved illumination optics using nonimaging bi-telecentricity for 193 nm scatterfield microscopy
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Diffractive-refractive hybrid microscope objective for 193-nm inspection systems
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Analysis of Köhler illumination for 193 nm scatterfield microscope
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