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2360 积分 2024-07-03 加入
High throughput 3D NAND structure monitoring by x-ray scattering
2个月前
已完结
Improvement of Twisting and Line-Edge Roughness of 3D NAND Deep Trench Etching on Yield Enhancement : AEPM: Advanced Equipment Processes and Materials
2个月前
已完结
HARDWARE DESIGN FOR CRYOGENIC ETCHING EQUIPMENT
3个月前
已完结
A novel double-density, single-gate vertical channel (SGVC) 3D NAND Flash that is tolerant to deep vertical etching CD variation and possesses robust read-disturb
3个月前
已完结
3D-NAND wafer process monitoring using high voltage SEM with auto e-Beam tilt technology
6个月前
已完结
Machine learning and hybrid metrology using HV-SEM and optical methods to monitor channel hole tilting in-line for 3D NAND wafer production
6个月前
已完结
Low-temperature etching of silicon oxide and silicon nitride with hydrogen fluoride
8个月前
已完结
Highly Scalable Metal Induced Lateral Crystallization (MILC) Techniques for Vertical Si Channel in Ultra-High (> 300 Layers) 3D Flash Memory
8个月前
已完结
Education Abstract: Thermal Challenges and Mitigation in 3D DRAM
8个月前
已完结
An approach to reduce surface charging with cryogenic plasma etching using hydrogen-fluoride contained gases
9个月前
已完结
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