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28 积分 2025-07-09 加入
A Multiphysics Modeling Approach for Thermal Aberration Prediction and Control in Extreme Ultraviolet Lithography
1年前
已完结
Active lens for thermal aberration compensation in lithography lens
1年前
已完结
Research on ship trajectory compression based on a Dynamic Programming algorithm
1年前
已完结
An online method for ship trajectory compression using AIS data
1年前
已完结
Modern Types of Axicons: New Functions and Applications
1年前
已完结
Configuration design for the variable pupil shaping unit of a photolithography machine
1年前
已关闭
Constrained pupil balance compensation for specific lithographic illuminator settings
1年前
已完结
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