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30 积分 2022-05-18 加入
Sub-10 nm patterning using EUV interference lithography
6小时前
待确认
20nm Line/space patterns in HSQ fabricated by EUV interference lithography
6小时前
已完结
Industrial photoresist development with the EUV laboratory exposure tool: mask fabrication, sensitivity and contrast
1天前
已完结
Development of EUV interference lithography for 25 nm line/space patterns
2天前
已完结
Interference lithography at EUV and soft X-ray wavelengths: Principles, methods, and applications
2天前
已完结
Standalone tools for actinic EUV pellicle qualification (Conference Presentation)
1个月前
已关闭
Silicon photodiode with selective Zr/Si coating for extreme ultraviolet spectral range
1个月前
已完结
Impact of residual stress on the deflection of extreme ultraviolet pellicles
2个月前
已完结
Investigation of EUV pellicle deflection and mechanical stress within EUV inner pod under vacuum activity
2个月前
已完结
Wrinkle formation analysis in extreme-ultraviolet pellicle
2个月前
已完结
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