Lv31
250 积分 2022-05-18 加入
High-accuracy detector calibration for EUV metrology at PTB
1个月前
已完结
Characterizing underlayer properties for EUV lithography via resonant soft x-ray reflectivity
1个月前
已关闭
EUV reflectance and scattering of Mo/Si multilayers on differently polished substrates
1个月前
已完结
Characterizing underlayer properties for EUV lithography via resonant soft x-ray reflectivity
1个月前
已关闭
High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers
1个月前
已关闭
Development of a reflectometer for a large EUV mirror in NewSUBARU
2个月前
已完结
Tabletop extreme ultraviolet reflectometer for quantitative nanoscale reflectometry, scatterometry, and imaging
2个月前
已完结
Study on photochemical analysis system (VLES) for EUV lithography
4个月前
已完结
Study of de-protection reaction analysis system for EUV lithography
4个月前
已完结
Grazing incidence mirrors for EUV lithography
7个月前
已完结
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