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14 积分 2025-07-14 加入
Atomic layer etching of Si3N4 with high selectivity to SiO2 and poly-Si
6小时前
待确认
Structural and electrical characteristics of ion-induced Si damage during atomic layer etching
6小时前
求助中
Low global warming C5F10O isomers for plasma atomic layer etching and reactive ion etching of SiO2 and Si3N4
6小时前
已完结
In situ atom-resolved observation of Si (111) 7×7 surface with F radical and Ar ion irradiation simulated atomic layer etching
6小时前
已完结
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