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905 积分 2020-04-19 加入
Investigation of Optimum Deposition Conditions of Radio Frequency Reactive Magnetron Sputtering of Al0.7Sc0.3N Film with Thickness down to 20 nm
7小时前
已完结
Role of oxygen on structure and piezoelectric properties of Al0.65Sc0.35N thin films
7小时前
已完结
A Machine Learning Study to Obtain an Optimal Processing Pulsed Frequency on Reactive Pulsed DC Sputtering of Aluminum Nitride Films
1个月前
已关闭
High-Performance Film Bulk Acoustic Resonator and Filter Based on an Al$_{\text{0.8}}$Sc$_{\text{0.2}}$N Film Prepared by a Low-Temperature Staged Deposition Method
1个月前
已完结
Highly Doped Single Crystal Al$_{\text{1}-\textit{x}}$Sc$_{\textit{x}}$N Bulk Acoustic Resonators for High-Frequency and Wideband Applications
1个月前
已完结
Investigation of Optimum Deposition Conditions of Radio Frequency Reactive Magnetron Sputtering of Al0.7Sc0.3N Film with Thickness down to 20 nm
1个月前
已完结
Preparation and Structural Investigation of Ultra-Uniform Mo Films on a Si/SiO2 Wafer by the Direct-Current Magnetron Sputtering Method
2个月前
已完结
Aluminum Scandium Nitride (AlScN) Films for Microelectromechanical Systems (MEMS)
2个月前
已完结
High-temperature annealing of AlGaN: Stress, structural, and compositional changes
4个月前
已完结
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