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40 积分 2021-02-07 加入
Increase of cleaning rate and reduction in global warming effect during C4F8O/O2 remote plasma cleaning of silicon nitride by adding NO and N2O
6小时前
待确认
Effect of N2O to C4F8/O2 on global warming during silicon nitride plasma enhanced chemical vapor deposition (PECVD) chamber cleaning using a remote inductively coupled plasma source
8小时前
已完结
Complex behaviour of isotopes in CO2 electroreduction
7个月前
已完结
Ethylene electrosynthesis at low voltages enabled by dopant-induced modulation of the rate-determining step
10个月前
已完结
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