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Microstructural characterization and inductively coupled plasma-reactive ion etching resistance of Y2O3–Y4Al2O9 composite under CF4/Ar/O2 mixed gas conditions
1天前
已完结
Microstructure and properties of Al2O3-Y2O3 ceramic composite coatings fabricated by plasma spraying
1天前
待确认
Microstructural evolution and plasma etching resistance of Y2O3-YAM composite layers sinter-bonded on Al2O3 substrate for semiconductor processing equipment
1天前
已完结
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