Lv3
344 积分 2026-03-23 加入
The thermomechanical integrity of thin films and multilayers
6天前
已完结
Cracking of thin bonded films in residual tension
6天前
已完结
Time-resolved measurements of highly polymerized negative ions in radio frequency silane plasma deposition experiments
6天前
已完结
The dependence of contamination particle traps on wafer material and topography
6天前
已完结
Particle trapping phenomena in radio frequency plasmas
6天前
已完结
Erosion of focus rings in capacitively coupled plasma etching reactors
6天前
已完结
Thermal Decomposition of NF3 with Various Oxides
14天前
已完结
Etching behavior of Y2O3 coatings in a capacitively coupled NF3/Ar/O2 plasma: Effects of bias power and pressure
14天前
已关闭
Advanced metal ion dipping-steam sealing for enhanced corrosion resistance of hard anodized aluminum in semiconductor plasma etching environments
14天前
已完结
A study on etching properties of 6061 Al alloy by dual-frequency (60 MHz/400 kHz) capacitively coupled Ar, Ar/O 2 , NF 3 /Ar and NF 3 /Ar/O 2 plasma
14天前
已完结
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