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498 积分 2026-03-23 加入
High-temperature electrostatic chuck enabled by BN dielectrics
9小时前
待确认
Electrostatic Force and Absorption Current of Alumina Electrostatic Chuck
11小时前
已完结
SPARC: a novel technology for depositing conformal dielectric thin films with compositional tuning for etch selectivity
1个月前
已完结
Measurement of the recombination constant of atomic fluorine
1个月前
已完结
Remote microwave plasma source for cleaning chemical vapor deposition chambers: Technology for reducing global warming gas emissions
1个月前
已完结
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