Lv41
498 积分 2026-03-23 加入
High-temperature electrostatic chuck enabled by BN dielectrics
3个月前
已完结
Electrostatic Force and Absorption Current of Alumina Electrostatic Chuck
3个月前
已完结
SPARC: a novel technology for depositing conformal dielectric thin films with compositional tuning for etch selectivity
4个月前
已完结
Measurement of the recombination constant of atomic fluorine
5个月前
已完结
Remote microwave plasma source for cleaning chemical vapor deposition chambers: Technology for reducing global warming gas emissions
5个月前
已完结