Lv22
190 积分 2023-09-25 加入
Combined iterative learning and delta-operator adaptive linear quadratic Gaussian control of a commercial rapid thermal processing system
1小时前
待确认
Thermal budget reduction for spike anneals in conventional RTP
1小时前
待确认
Impact of Patterned Layers on Temperature Non-Uniformity during Rapid Thermal Processing for VLSI-Applications
3天前
已完结
Thermal processing in semiconductor implant annealing: Historical and technological evolution
14天前
已完结
Low temperature RTP for BCB curing
14天前
已完结
基于输出反馈的若干非光滑控制理论与应用研究
2个月前
已完结
Stabilization via Nonsmooth, Nonconvex Optimization
2个月前
已完结
智能材料驱动系统自适应输出反馈跟踪控制方法研究
4个月前
已完结
Thermal and stress analysis of semiconductor wafers in a rapid thermal processing oven
5个月前
已完结
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