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166 积分 2025-12-26 加入
Fundamental Limits of Optical Critical Dimension Metrology: A Simulation Study
1个月前
已完结
Multitechnique metrology methods for evaluating pitch walking in 14 nm and beyond FinFETs
1个月前
已关闭
The art of holistic metrology
1个月前
已关闭
OPTICAL CRITICAL DIMENSION MEASUREMENT FOR SOURCE/DRAIN STRUCTURES AT ADVANCED NODE
1个月前
已完结
Scatterometry solutions for 14nm half-pitch BEOL layers patterned by EUV single exposure
1个月前
已关闭
Process monitoring for imec N14 FinFET flow using angular resolved scatterometry
1个月前
已完结
Novel in-line metrology methods for Fin pitch walking monitoring in 14nm node and beyond
1个月前
已完结
Sensitivity study and parameter optimization of OCD tool for 14nm finFET process
1个月前
已完结
OPTICAL CRITICAL DIMENSION MEASUREMENT FOR 16/14 nm FINFET
1个月前
已关闭
Composite smoothed quantile regression
1个月前
已采纳
An Ion-Based Strategy Toward Synergistic Surface Functionalization Combining the Osteogenic Properties and NIR-Mediated Antibacterial Activity of PEEK
1个月前
已采纳
Point‐of‐Care Ultrasound and Clinical Findings in 14 Cats With High‐Rise Syndrome
1个月前
已采纳
A novel approach based on PEM electrolysis technology for iron recovery from acid mine drainage: performance and mechanism
5个月前
已采纳
Effects of enoxaparin and aspirin on metastatic spread in a murine melanoma model
5个月前
已采纳
From hydrogeochemical genesis to public health risk: Unveiling the links between geogenic arsenic, fluoride, and iodine in groundwater
5个月前
已采纳
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