Lv4
790 积分 2023-07-16 加入
Plasma enhanced atomic layer deposition of silicon nitride and silicon carbonitride using a single source precursor and different plasmas
25天前
已关闭
Development of mask absorbers for next generation EUV lithography
1个月前
已完结
Absorber dependence of M3D overlay errors in high-NA and hyper-NA EUV lithography
1个月前
已完结
Resolution enhancement for high-NA extreme ultraviolet lithography using aperiodic multilayer masks
1个月前
已完结
Pupil optimization of EUV low-n attenuated phase shift mask for improvement of random contact hole patterning proceedings
1个月前
已完结
Imaging characteristics of reflective EUV masks
1个月前
已完结
Advancing semiconductor patterning with EUV hyper NA: opportunities and challenges
1个月前
已完结
Improving etchability of challenging materials through the ion implantation process
1个月前
已完结
New EUV mask and blanks for DRAM 1a nm and beyond
1个月前
已完结
Multi-tasks diagnosis of alzheimer’s disease based on multi-modalities images brain networks and quaternion convolutional neural networks
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