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An AlN MEMS Piezoelectric Microphone for Aeroacoustic Applications
3天前
已完结
Design and Fabrication of a Piezoelectric Bimorph Microphone with High Reliability and Dynamic Range Based on Al0.8Sc0.2N
3天前
已完结
Piezoelectric MEMS microphones based on rib structures and single crystal PZT thin film
3天前
已完结
Piezoelectric MEMS microphones based on rib structures and single crystal PZT thin film
7天前
已完结
Stress analysis of circular membrane-type MEMS microphones with piezoelectric read-out
7天前
已完结
Stress Concentrated Piezoelectric Acoustic Pressure Sensors With Enhanced Sensitivity and Stiffness for High SPL Applications
7天前
已完结
Design and Implementation of a High-Sensitivity Inertial Cilium Combined Hydrophone for Low-Frequency Detection
7天前
已完结
Effect of thermal stresses on stability and frequency response of a capacitive microphone
8天前
已完结
On the single-chip condenser miniature microphone using DRIE and backside etching techniques
8天前
已完结
The design, fabrication, and testing of corrugated silicon nitride diaphragms
8天前
已完结