Lv21
110 积分 2024-09-19 加入
Numerical simulation study of the flow and diffusion characteristics of trace gas in a gas mixture based on the ellipsoidal statistical Bhatnagar–Gross–Krook model
2小时前
求助中
A novel plasma setup for realistic material and optics life-time testing
26天前
已完结
Measurements of ion fluxes in extreme ultraviolet-induced plasma of new EUV-beam-line 2 nanolithography research machine and their applications for optical component tests
1个月前
已完结
Evaluation of drag and lift forces on nonspherical particles in a gas
2个月前
已完结
Photon Sources for Lithography and Metrology
5个月前
已关闭
Plasma Physics via Computer Simulation
7个月前
已关闭
Drag coefficient for micron-sized particle in high-speed flows
8个月前
已完结
Development of a dynamic gas lock inhibited model for EUV-induced carbon deposition
9个月前
已完结
High-NA EUV lithography enabling Moore’s law in the next decade
9个月前
已完结
Imaging effects of particles on the surface of EUV mask and wafer
10个月前
已完结
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