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Mechanical Abrasion by Bi-layered Pad Micro-Asperity in Chemical Mechanical Polishing
5天前
已完结
Development of mesoporous SiO2/CeO2 core/shell nanoparticles with tunable structures for non-damage and efficient polishing
1个月前
已完结
Improved chemical mechanical polishing performance in 4H-SiC substrate by combining novel mixed abrasive slurry and photocatalytic effect
1个月前
已完结
Synthesis and Characterization of Fe3O4@SiO2 Core-shell Nanoparticles for Mirror and Efficient Magnetic Compound Fluid Polishing of TC4 Titanium alloy
1个月前
已完结
Effect of dispersion performance of polishing slurry on the polishing quality of glass-ceramics in bonnet polishing
1个月前
已完结
Particle size dependence of nanoclustered ceria abrasives on surface activity and chemical mechanical planarization performance
1个月前
已完结
Influence of abrasive morphology and size dispersity of Cu barrier metal slurry on removal rates and wafer surface quality in chemical mechanical planarization
1个月前
已完结
Effect of Abrasive Particle Size Distribution on Removal Rate of Silicon Wafers
1个月前
已完结
Quadrature moment simulation of silica nanoparticles aggregation and breakage in chemical mechanical polishing
1个月前
已完结
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