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Numerical simulation of capacitively coupled plasma driven by tailored voltage waveforms with electron beam injection modulation
6个月前
已关闭
Numerical simulation of capacitively coupled plasma driven by tailored voltage waveforms with electron beam injection modulation
6个月前
已关闭
Numerical simulation of capacitively coupled plasma driven by tailored voltage waveforms with electron beam injection modulation
6个月前
已关闭
Use of plasma process diagnostic sensors for the monitoring of in situ dry cleaning of plasma enhanced chemical vapor deposition chamber
8个月前
已完结
Use of plasma process diagnostic sensors for the monitoring of in situ dry cleaning of plasma enhanced chemical vapor deposition chamber
8个月前
已关闭
Effect of focus ring with external circuit on cathode edge sheath dynamics in a capacitively coupled plasma
8个月前
已完结
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