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50 积分 2025-10-10 加入
Deep reactive ion etching of silicon using non-ICP-based equipment
1个月前
已完结
Sub-200-nm-diameter cylindrical silicon nanopillars with high aspect ratio (40:1) fabricated by SF6/C4F8-modulated ICP-RIE
1个月前
已完结
Fabrication of local areas of high aspect ratio silicon structures using metal-assisted chemical etching
3个月前
已完结
Enhancement of etching properties using pulsed inductively coupled plasma for high aspect ratio TiO₂ pillars in metalens fabrication
5个月前
已完结
Multi-step plasma etching of high aspect ratio silicon nanostructures for metalens fabrication
6个月前
已完结
Review for optical metalens based on metasurfaces: fabrication and applications
6个月前
已完结
The study and optimization of ICP deep etching at a low-temperature for InP solid-immersion metalens fabrication
6个月前
已完结
Low-damage optical manufacturing via plasma finishing and figuring
6个月前
已完结
The Optimization of Metasurface lenses Fabrication based on Silicon Pillars within the fab's 12-inch production line
6个月前
已完结
Polarization-insensitive bifocal metalenses by combining nanoimprint lithography and atomic layer deposition in the visible spectrum
7个月前
已完结
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