Lv61
2230 积分 2022-08-08 加入
Extremely long life excimer laser chamber technology for multi-patterning lithography
1个月前
已完结
Next-generation ArF laser technologies for multiple-patterning immersion lithography supporting leading edge processes
1个月前
已完结
Advances in DUV light source sustainability
1个月前
已完结
Adaptation of TCAD simulation in excimer laser doping
1个月前
已完结
Effects of tunable circuit parameters on pulsed discharge and input-output characteristics of a XeCl excimer laser
1个月前
已关闭
Update of >300 W high power LPP-EUV source challenge IV for semiconductor HVM
5个月前
已完结
Diagnostics of Tin Droplet-Based Laser Produced Plasma by Triple Langmuir Probe
5个月前
已完结
Time-Resolved Two-Dimensional Electron Density Profiles of Laser-Produced Tin Droplet Plasma
5个月前
已关闭
Influence of CO2-laser pulse parameters on 13.5 nm extreme ultraviolet emission features from irradiated liquid tin target
5个月前
已完结
EUV spectroscopy of Sn5+–Sn10+ ions in an electron beam ion trap and laser-produced plasmas
6个月前
已完结
皖公网安备34019202002308
