Lv4
558 积分 2025-10-17 加入
Atomic layer deposition of Al2O3 thin films using trimethylaluminum and acetone
28天前
已完结
Intrinsic Mechanical Properties of Free-Standing SiNx Thin Films Depending on PECVD Conditions for Controlling Residual Stress
1个月前
已完结
High-pure AlN crystalline thin films deposited on GaN at low temperature by plasma-enhanced ALD
1个月前
已完结
Growth mechanism study of boron nitride atomic layer deposition by experiment and density functional theory
1个月前
已完结
Area-selective deposition and bottom-up approaches: an overview of applications in IC manufacturing
1个月前
已关闭
Challenge to achieve thermal atomic layer etching of non-volatile materials via stable organometallic complex formation
1个月前
已完结
Atomic layer deposition of high-k and metal thin films for high-performance DRAM capacitors: A brief review
1个月前
已完结
PEALD-grown HfTiO high-k dielectrics enabling high-performance IGZO thin film transistors
1个月前
已关闭
Atomic layer deposition of high-k and metal thin films for high-performance DRAM capacitors: A brief review
2个月前
已完结
Atomic layer etching of high-k oxide thin films using hexafluoroacetylacetone and oxygen radicals
2个月前
已完结
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