Lv1
30 积分 2026-06-01 加入
Plasma atomic layer etching of molybdenum with surface fluorination
10小时前
已完结
Low-temperature plasma atomic layer etching of molybdenum via sequential oxidation and chlorination
10小时前
已完结
Plasma enhanced atomic layer deposition and atomic layer etching of gallium oxide using trimethylgallium
10小时前
已完结
Effect of different pulse modes during Cl2/Ar inductively coupled plasma etching on the characteristics of nanoscale silicon trench formation
10小时前
已完结