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176 积分 2024-03-11 加入
On Gas-Phase Selective Dry Etching in 3D Inflections
16天前
已完结
A Novel Method For Molybdenum Etching Using a Combination of Surface Oxidation By Ozone-Gas-Bake and Wet Selective Removal for Future Semiconductor Devices
16天前
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Etching of molybdenum via a combination of low-temperature ozone oxidation and wet-chemical oxide dissolution
16天前
已完结
Effect of the H2/N2 Ratio on Molybdenum Nitride Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition: Applications for Next-Generation Interconnects
3个月前
已完结
Evolutionary trends and challenges of 3D NAND flash memory technology
3个月前
已完结
Evolutionary trends and challenges of 3D NAND flash memory technology
3个月前
已完结
Enhanced Oxidation Resistance and Interface Stability of Atomic-Layer-Deposited MoNx Electrodes via TiN Passivation for DRAM Cell Capacitor Applications
4个月前
已完结
Thermal Atomic Layer Deposition of Aluminum–Molybdenum Oxide Films Using Trimethylaluminum, Molybdenum Dichloride Dioxide and Water
4个月前
已完结
Growth of Aluminum Molybdenum Oxide Films by Atomic Layer Deposition with Using Trimethylaluminum, Molybdenum Oxytetrachloride, and Water
4个月前
已关闭
Fabrication and mechanical behaviour of Al2O3/Mo nanocomposites
4个月前
已关闭