Lv4
488 积分 2025-03-26 加入
Development of a dynamic gas lock inhibited model for EUV-induced carbon deposition
3个月前
已完结
Production of 13.5 nm light with 5% conversion efficiency from 2 μ m laser-driven tin microdroplet plasma
3个月前
已完结
Particle charging during pulsed EUV exposures with afterglow effect
3个月前
已完结
Metal-Core-Specific Screening with Machine Learning: Accelerating the Discovery of Metal Oxide Clusters for Enhanced EUV Lithography Resolution
3个月前
已完结
Pollutant inhibition in an extreme ultraviolet lithography machine by dynamic gas lock
3个月前
已完结
Analysis of trade-off relationships between resolution, line edge roughness, and sensitivity in extreme ultraviolet lithography using lasso regression
3个月前
已完结
Enhancing mask synthesis for curvilinear masks in full-chip extreme ultraviolet lithography
3个月前
已完结
Fast extreme ultraviolet lithography mask near-field calculation method based on machine learning
3个月前
已完结
Measurements of ion fluxes in extreme ultraviolet-induced plasma of new EUV-beam-line 2 nanolithography research machine and their applications for optical component tests
3个月前
已完结
Unraveling Device Physics of Dilute‐Donor Narrow‐Bandgap Organic Solar Cells with Highly Transparent Active Layers
8个月前
已完结
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