Lv7
4310 积分 2023-02-22 加入
Numerical study on the effectiveness of precursor isolation using N2 as gas barrier in spatial atomic layer deposition
5小时前
已完结
Spatial atomic layer deposition: Transport-reaction modeling and experimental validation of film geometry
5小时前
已完结
Multiscale CFD modelling for conformal atomic layer deposition in high aspect ratio nanostructures
5小时前
已完结
Practical Method for Designing Gas Conditions of Atomic Layer Deposition
5小时前
已完结
Reactor scale simulation of an atomic layer deposition process
5小时前
已完结
Computational fluid dynamics simulation of the ALD of alumina from TMA and H2O in a commercial reactor
5小时前
已完结
Reactor scale simulations of ALD and ALE: Ideal and non-ideal self-limited processes in a cylindrical and a 300 mm wafer cross-flow reactor
5小时前
已完结
Multiscale Computational Fluid Dynamics Modeling of Thermal and Plasma Atomic Layer Deposition: Application to Chamber Design and Process Control
5小时前
求助中
Deep Learning in Atomic Layer Deposition
5小时前
待确认
Atomic Layer Deposition
5小时前
已完结