Lv6
1620 积分 2024-02-19 加入
Selective and Superconformal Molybdenum Growth Strategies for Advanced Metallization
1天前
已完结
Enhanced Area-Selective Deposition via NH 3 Plasma Treatment in Atomic Layer Deposition for Si/TiN Substrates
1天前
已完结
Plasma-Enhanced Atomic Layer Deposition of TiN Thin Films Using Ultralow Electron Temperature Plasma
2天前
已完结
Inhibitor-Assisted Atomic Layer Deposition for Uniformly Doped Ultrathin Films: Overcoming Compositional and Thickness Limitations
1个月前
已完结
Deposition of Pinhole and Particle Free Subnanometer TiN Films in High Aspect Ratio Spaces
2个月前
已完结
Electron ptychography achieves atomic-resolution limits set by lattice vibrations
4个月前
已完结
Atomic layer etching of titanium nitride with surface modification by Cl radicals and rapid thermal annealing
5个月前
已完结
Outside Front Cover: Low Temperature Atomic Layer Deposition of (00l)‐Oriented Elemental Bismuth
5个月前
已完结
Deposition selectivity on oxide versus metal surfaces via catalyzed atomic layer deposition of SiO2 and vapor-dosed phosphonic acid inhibitors
5个月前
已关闭
Adsorption mechanism of hexachlorodisilane for low-temperature atomic layer deposition of silicon nitride
5个月前
已完结
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