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1730 积分 2024-02-19 加入
Properties of low-resistivity molybdenum metal thin film deposited by atomic layer deposition using MoO2Cl2 as precursor
25天前
已完结
Molecular structure and vapor pressure of molybdenum pentachloride using ab-initio thermodynamics
25天前
已完结
Electrical behavior of ALD-molybdenum films in the thin-film limit
26天前
已完结
Review of Material Properties of Oxide Semiconductor Thin Films Grown by Atomic Layer Deposition for Next-Generation 3D Dynamic Random-Access Memory Devices
1个月前
已完结
Large-area structural color TiAlN/Al/TiN/TiAlN coatings with robust adhesion on polycarbonate via sputtering
1个月前
已完结
3D DRAM with stacked oxide-semiconductor channel transistors
1个月前
已完结
Atomic layer deposition
1个月前
已完结
Selective and Superconformal Molybdenum Growth Strategies for Advanced Metallization
1个月前
已完结
Enhanced Area-Selective Deposition via NH 3 Plasma Treatment in Atomic Layer Deposition for Si/TiN Substrates
1个月前
已完结
Plasma-Enhanced Atomic Layer Deposition of TiN Thin Films Using Ultralow Electron Temperature Plasma
1个月前
已完结
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