Lv5
950 积分 2021-03-05 加入
The integration of double-layer triangular micro-channel in three-dimensional integrated circuits for enhancing heat transfer performance
3小时前
已完结
A possible wafer heating during EUV exposure
12天前
已完结
Mechanisms underlying temperature uniformity in electrostatic chucks through experimental and simulation methods
2个月前
已完结
Evaluation of surface temperature uniformity of multi-zone ceramic heaters with embedded cooling channels for electrostatic chuck
2个月前
已完结
Optimization of the Thermal Field of 8-Inch Sic Crystal Growth by Pvt Method with “3 Separation Heater Method”
4个月前
已完结
Insights into the thermal and electric field distribution and the structural optimization in the graphitization furnace
8个月前
已完结
Design of a high temperature chemical vapor deposition reactor in which the effect of the condensation of exhaust gas in the outlet is minimized using computational modeling
8个月前
已完结
Experimental and numerical study of the PVT design impact on the electrical and thermal performances
8个月前
已完结
Heat transfer analysis on wafer annealing process in semiconductor multi-wafer furnace using CFD simulation
10个月前
已完结
Composition, structure, and magnetic properties of SiCxNyFez films produced by the PECVD method from a gas mixture of 1,1,1,3,3,3-hexamethyldisilazane, ferrocene, and helium
1年前
已完结
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