Lv54
1390 积分 2025-02-06 加入
An overview of molecular layer deposition for organic and organic–inorganic hybrid materials: mechanisms, growth characteristics, and promising applications
2小时前
已完结
Impact of Zn-based inorganic-organic hybrid thin film structure on patterning performance for dry EUV resist applications
6小时前
求助中
Effect of Networking Density on the Patterning Performance of Molecular Layer Deposited Alucone Electron Beam/EUV Resists
8小时前
已完结
In Situ Analysis of Electron-Induced Chemical Transformations in Vapor-Phase-Synthesized Al-Based Inorganic–Organic Hybrid Thin Films for EUV Resist Platform
8小时前
已完结
Comparison of Al- and Hf-based hybrid photoresists grown by molecular layer deposition for extreme ultraviolet lithography
3天前
已完结
Study of molecular layer deposition of zinc-based hybrid film as photoresist
3天前
已完结
An aluminum-based hybrid film photoresist for advanced lithography by molecular layer deposition
3天前
已完结
Molecular Layer Deposition of a Hafnium-Based Hybrid Thin Film as an Electron Beam Resist
3天前
已完结
Area-Selective Molecular Layer Deposition of Alucone on Photoresist for Enhanced Pattern Transfer
3天前
已完结
Molecular layer deposition of tin-based organic–inorganic hybrid films as photoresists
3天前
已完结