Lv2
110 积分 2024-01-02 加入
Measurements of atomic hydrogen recombination coefficients and the reduction of Al2O3 using a heat flux sensor
16天前
已完结
Tin removal by an annular surface wave plasma antenna in an extreme ultraviolet lithography source
18天前
已完结
Miniature plasma source for in situ extreme ultraviolet lithographic scanner cleaning
1个月前
已完结
Angle-resolved scattering and reflectance of extreme-ultraviolet multilayer coatings: measurement and analysis
2个月前
已完结
Overcoming Ce–O–Si bonding: A pre-cleaning strategy for removing ceria particles on wafer surface after chemical mechanical polishing
2个月前
已关闭
The effect of non-ionic surfactants on the removal of cerium oxide particles in STI CMP post cleaning
2个月前
已关闭
Investigation of the effect of different cleaning forces on Ce-O-Si bonding during oxide post-CMP cleaning
2个月前
已完结
Oxidation behaviour of boron carbide powder
3个月前
已完结
Physical and chemical analysis of La/B4C multilayer structure with carbon barriers for ∼6.7 nm EUV application
3个月前
已完结
Modeling radiation-induced carbon contamination of extreme ultraviolet optics
4个月前
已完结
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