Lv3
260 积分 2025-08-08 加入
Development of a novel closed EUV pellicle for EUVL manufacturing
3个月前
已完结
Balancing sensitivity and resolution by feedback regulation of free radicals from Sn-C bonds in tin-oxygen clusters EBL photoresist
6个月前
已完结
Predicting photoresist sensitivity using machine learning
6个月前
已完结
Accurate determination of the 3D atomic structure of amorphous materials
7个月前
已完结
Influence of a laser intensity on EUV brightness and ion speed from a laser-assisted discharge-produced plasma
11个月前
已完结
Advancements and Applications of Diffractive Optical Elements in Contemporary Optics: A Comprehensive Overview
11个月前
已完结
Exploring Diffractive Optical Elements and Their Potential in Free Space Optics and imaging‐ A Comprehensive Review
11个月前
已完结
Imaging with sub-38 nm spatial resolution using a tabletop 13 nm wavelength laser
11个月前
已关闭
Aerial Image Microscope for the inspection of defects in EUV masks
11个月前
已完结
Extreme Ultraviolet Talbot Lithography
1年前
已关闭