Lv44
570 积分 2025-09-29 加入
Catadioptric lens design: The breakthrough to hyper-NA optics
5天前
已完结
Toward the Global Optimum in Lithographic Lens Design
18天前
已完结
Design of an objective for a hyper-numerical-aperture immersion lithography tool with a multi-step alternative grouping design method
20天前
已完结
Latest results from the Nikon NSR-S620 double patterning immersion scanner
21天前
已完结
Birefringence issues with uniaxial crystals as last lens elements for high-index immersion lithography
21天前
已完结
Optimizing and enhancing optical systems to meet the low k 1 challenge
26天前
已完结
In-line wavefront aberration adjustment of a projection lens for a lithographic tool using the dominant mode method
27天前
已完结
Refractivity of nitrogen gas in the vacuum ultraviolet
27天前
已完结
Study of the impact of gas temperature and pressure on image quality of lithography objective lens
27天前
已完结
Integrated projecting optics tester for inspection of immersion ArF scanner
1个月前
已完结