Lv1
10 积分 2024-07-01 加入
Improved deep-etched multilayer grating reconstruction by considering etching anisotropy and abnormal errors in optical scatterometry
2小时前
已完结
Application of measurement configuration optimization for accurate metrology of sub-wavelength dimensions in multilayer gratings using optical scatterometry
4小时前
已完结
Near-infrared chirality of plasmonic metasurfaces with gold rectangular holes
3个月前
已完结
Low-cost energy-efficient EUV lithography for advanced semiconductor manufacturing
8个月前
已完结
Phase defect detection algorithm for extreme ultraviolet mask blank based on watershed edge detection
1年前
已完结
Study on defocus image-based template matching algorithm for extreme ultraviolet mask phase defect detection
1年前
已完结
Phase defect detection algorithm for extreme ultraviolet mask blank based on watershed edge detection
1年前
已完结
Flexible dynamic quantitative phase imaging based on division of focal plane polarization imaging technique
1年前
已完结
Target-surface multiplexed quantitative dynamic phase microscopic imaging based on the transport-of-intensity equation
1年前
已完结
Retrieval of phase and three-dimensional topography using modified transport of intensity and phase equations with electrically programmable optical path lengths
1年前
已完结