| 标题 |
Nanoimprint with thin and uniform residual layer for various pattern densities |
| 网址 | |
| DOI | |
| 其它 |
期刊:Microelectronic Engineering 作者:Hiroshi Hiroshima 出版日期:2008-12-10 |
| 求助人 | |
| 下载 |
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(2025-6-4)