| 标题 |
Polishing pressure distribution analysis in CMP process with airbag type polishing head
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| DOI |
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| 其它 | Suzuki N, Asaba M, Kato A, Shamoto E (2013) Polishing Pressure Distribution Analysis in CMP Process with Airbag Type Polishing Head. Proceedings of International Conference on Planarization/CMP Technology 166–170. |
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(2025-6-4)
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