| 标题 |
The Structural and Electrical Properties of High-K Hf-Sm-O Thin Films Prepared by Atomic Layer Deposition |
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期刊:2023 IEEE 24th International Conference of Young Professionals in Electron Devices and Materials (EDM) 作者:Darya E. Petukhova; Vadim N. Kichay; Mikhail S. Lebedev 出版日期:2023-08-30 |
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(2025-6-4)