| 标题 |
Numerical studies on the standing wave effect in capacitively coupled very high-frequency plasmas |
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| DOI | |
| 其它 |
期刊:2024 IEEE International Conference on Plasma Science (ICOPS) 作者:Y.-M. Cui; Q.-Z. Zhang 出版日期:2024-08-22 |
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(2025-6-4)