纳米线
纳米技术
光子学
微电子
材料科学
硅
蚀刻(微加工)
各向同性腐蚀
硅光子学
硅纳米线
制作
纳米结构
纳米尺度
光电子学
病理
医学
替代医学
图层(电子)
作者
Antonio Alessio Leonardi,Maria Josè Lo Faro,Emanuele Luigi Sciuto,Sabrina Conoci,Barbara Fazio,Alessia Irrera
标识
DOI:10.1080/10420150.2022.2136082
摘要
The arising of new physical phenomena at the nanoscale promoted for the scientific community the emerging of silicon nanostructures for future challenging technologies involving innovative applications in light management and photonics. Silicon nanowires (Si NWs) are already considered strategic systems for very different applications such as microelectronics, energy, and sensors. Nonetheless, the use of Si NWs for photonic applications is very limited. The reason for these poor results in the photonic field is related to the fabrication methods that generally are used to obtain silicon nanowires. One of the most promising approaches to realize Si NWs with a low-cost and Si technology compatibility is metal-assisted chemical etching. In this paper, we report a review of silicon nanowires realized by metal chemical etching for photonic applications focusing our attention on the realization of light-emitting Si NWs.
科研通智能强力驱动
Strongly Powered by AbleSci AI