High performance materials processing using tailored femtosecond laser pulses
作者
Koji Sugioka,Katsumi Midorikawa,Fei He,Ya Cheng
标识
DOI：10.1109/cleopr.2015.7375984
摘要
Tailored femtosecond laser pulses can enhance the performance for materials processing. Temporarily tailored femtosecond laser pulses are employed for high efficiency glass welding, while the spatially one, for formation of taper-free through Si vias.
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(2025-6-4)
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