An ASIC Interface for MEMS Vibratory Gyroscopes With a 110 dB DR and 0.001 °s/√Hz Noise Floor Over a 100 Hz

This paper presents an ASIC interface for MEMS vibratory gyroscopes with a wide tuning range from 5 kHz to 20 kHz. This ASIC interface integrates a sense open-loop module, a drive close-loop module and mode control circuits. An ultra-high sensitivity and low-power dual chopper amplifier for the signal conditioning of the capacitance-voltage converter and an excellent dynamic range of $110 \mathrm{~dB}$ over a signal band of $100 \mathrm{~Hz}$ analog-to-digital converter are proposed for sense and drive loop detective. The readout interface is fabricated in a 0.18μm BCD technology with an HV-module and OTP. Measurement results indicate that this ASIC interface achieves a noise floor of 0.001 $\circ / \mathrm{s} / \sqrt{ } \mathrm{H z}$ over $100 \mathrm{~Hz}$, a bias stability and a bias instability of $\mathrm{2. 6}$ $\circ / \mathrm{h}$ and $1.05 \circ / \mathrm{h}$, respectively. Moreover, the full-scale range is higher than $\pm 1440 \circ / \mathrm{s}$.