Flexible Antibacterial Respiratory Monitoring Sensor Based on Controllable Au-Modified Surface of Highly {001} Preferred Anatase Titanium Dioxide Thin Film

Respiratory signals are critical clinical diagnostic criteria for respiratory diseases and health conditions, and respiratory sensors play a crucial role in achieving the desired respiratory monitoring effect. High sensitivity to a single factor can improve the reliability of respiratory monitoring, and maintaining the hygiene of the sensors is also important for daily health monitoring. Herein, we propose a flexible Au-modified anatase titanium dioxide resistive respiratory sensor, which can be mechanically compliantly attached to curved surfaces for respiratory monitoring in different modalities (i.e., respiratory intensity, frequency, and rate). The uniform and preferentially oriented anatase titanium dioxide films gained by the polymer-assisted deposition technique can be fabricated on flexible substrates through a liquid-assisted transferring process. The Au modification can enhance surface plasmon resonance to facilitate the photocatalytic activity of titanium dioxide, and the optimized distribution of Au on the surface of titanium dioxide film made the sensor have an excellent antibacterial effect. The uniquely designed encapsulation can effectively control the contact between the surface of titanium dioxide films and electrodes, allowing the flexible sensor to exhibit fast response time (0.71 s) and recovery time (1.06 s) to respiratory as well as insensitivity or low sensitivity to other factors (i.e., gas composition, humidity, temperature, stress, and strain). This work provided an effective strategy for flexible wearable respiratory sensors and has great potential in daily respiratory monitoring for health management and pandemic control.