单斜晶系
铁电性
正交晶系
材料科学
退火(玻璃)
微晶
极化(电化学)
结晶学
晶体结构
分析化学(期刊)
光电子学
电介质
化学
物理化学
色谱法
冶金
复合材料
作者
Chih-Yu Teng,Chia-Chieh Cheng,Kai-Shin Li,Chenming Hu,Jhih‐Min Lin,Bi‐Hsuan Lin,Mau‐Tsu Tang,Yuan‐Chieh Tseng
出处
期刊:ACS applied electronic materials
[American Chemical Society]
日期:2023-02-07
卷期号:5 (2): 1114-1122
被引量:2
标识
DOI:10.1021/acsaelm.2c01582
摘要
This study exploits the coupling of crystallographic and ferroelectric (FE) properties in an effort to enhance the FE performance of Hf1–xZrxO2 (HZO). The proposed scheme involved optimizing the orientation of orthorhombic (O)-phase crystals along the preferred polarization axis by applying an electric pulse during annealing. The proposed electric pulse annealing (EPA) process reduced the need for wake-up treatment; however, it imposed limited changes on the amount of the O-phase and leakage performance, compared with rapid thermal annealing (RTA). Excessively high EPA doses induced an O → M (monoclinic) phase transformation, which sacrificed FE polarization but preserved the wake-up-free-like properties. Our results demonstrate that optimizing the orientation of polycrystalline O-phase may be as important as maximizing the quantity of O-phase for HZO applications.
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