Grain Growth in Thin Films

in the average crystal orientation and can even result in epitaxial films. It is therefore not surprising that grain growth can profoundly affect the mechanical, electrical, and chemical properties of thin films. In this article the mechanisms and modes of grain growth in thin films will be reviewed. The focus will be on those factors that lead to the evolution of grain orientations as well as grain si zes. Spec ific attention will also be gi ven to those factors that allow control of microstructural evolution in thin films.