Nanometrology of an ultraprecision machined surface by using optical sensors

This paper presents nanometrology of an ultraprecision machined surface by using optical sensors. To verify the feasibilities of optical sensors on the measurement of surface profile, different types of fiber-optic sensor and laser micro interferometer are employed to measure the roundness of a ultraprecision machined cone in this paper. Experiments confirmed that the fiber-optic sensor can measure not only the roundness but also the surface roughness of the cone. Experiments also confirm that the measurement of the laser micro interferometer is highly affected by the surface roughness of the cone because of the relative measurement principle of the laser micro interferometer.