Bilayer channel structure to improve the stability of solution-processed metal oxide transistors under AC stress

材料科学 薄膜晶体管 光电子学 阈值电压 双层 压力(语言学) 无定形固体 氧化物 带隙 氧化铟锡 晶体管 纳米技术 图层(电子) 电压 电气工程 化学 冶金 语言学 哲学 工程类 有机化学 生物化学
作者
Tae Sun Park,Dongil Ho,H. H. Park,Sung Kyu Park,Choongik Kim
出处
期刊:Materials Science in Semiconductor Processing [Elsevier]
卷期号:171: 108000-108000
标识
DOI:10.1016/j.mssp.2023.108000
摘要

In this work, we report solution-processed bilayer channel thin film transistors (TFTs) based on solution-processed amorphous oxide semiconductors (AOSs) that fulfill both superb electrical performance and device stability against applied alternating current (AC) drain bias stress. Acceptor-like states generation via hot carrier effect (HCE) is a representative device degradation mechanism suggested for AOS-based TFTs when subjected to AC bias stress, featuring threshold voltage (Vth) shift and on-current (Ion) lowering. As excess electric field and accumulated carriers in the AOS channel cause HCE, alleviating carrier accumulation is a key solution for mitigating HCE. Bilayer channel TFTs comprising two different AOSs could work as a countermeasure to overcome HCE since proper energy band alignment of two channels creates a conduction band difference that act as the energy barrier for carriers. In this regard, we employed amorphous indium-gallium-zinc oxide (IGZO) and zinc-tin oxide (ZTO) as bottom and top layer, respectively, for bilayer channel TFT. Designed bilayer channel showed a conduction band difference of 0.18 eV, and fabricated TFT based on this architecture exhibited high mobility over to 5.9 cm2/Vs with slight Vth shift of 0.1 V and Ion lowering of 1.7% for 1000 s against applied AC stress, demonstrating device stability under AC drain bias stress.
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