1D Conductive Metal‐Organic Framework‐Enabled Dual‐Parameter MEMS Gas Sensor for Thermal Runaway Monitoring

Abstract The electric vehicle industry faces safety challenges from battery thermal runaway, necessitating real‐time monitoring of multi‐parameter signals like gas concentration and temperature in oxygen‐free environments. This study introduces dual‐parameter micro‐electro‐mechanical system (MEMS) sensors based on 1D conductive metal‐organic frameworks (MOFs) – MBTA (M = Cu or Ni). Synthesized via room‐temperature wet chemical coordination polymerization using 1,2,4,5‐benzenetetramine ligands and transition metals, these chain‐structured MOFs exhibit dual sensitivity to carbon monoxide (CO) and temperature. The MBTA films are grown in situ on 4‐channel MEMS devices through vapor diffusion, creating gas‐temperature sensors. Under anhydrous, oxygen‐free conditions, the sensors achieve low CO detection limits with high selectivity and stability, while demonstrating linear temperature responses across 20–120 °C. Polydimethylsiloxane encapsulation isolates the CO‐sensing channels from temperature‐detection channels, enabling decoupled parameter measurements. Integrated with data processing and wireless transmission modules, the system supports remote environmental monitoring. This work advances multimodal sensing mechanisms with temperature compensation and lays the groundwork for wireless real‐time monitoring systems, significantly enhancing thermal runaway early‐warning capabilities in lithium‐ion batteries. The design strategy provides insights for developing multifunctional sensing materials and safety management technologies in energy storage applications.