Effect of nitrogen/argon ratios on structures and properties of high-entropy (ZrTiNbV)N nitride films by multi-arc ion plating

The multi-arc ion plating technique has been used to prepare high-entropy (ZrTiNbV)N ceramic films. Meanwhile, the effects of different nitrogen/argon ratios of RN on film microstructures, mechanical properties, tribological properties and corrosion resistance are systematically investigated. The high-entropy (ZrTiNbV)N ceramic films with face-centered cubic structure are fabricated when the RN exceeded the critical value of RN = 1. Additionally, the films form dense structures and bond tightly to the substrate under all RN conditions. Compared with other films, the films deposited at RN = 3 have the best mechanical and tribological properties. The hardness up to 31.70 ± 1.67 GPa, and the wear rate is as low as (3.39 ± 0.18) ×10−6 mm3/N−1m−1. Moreover, the corrosion current density in 3.5 wt.% NaCl solution is only 1.119×10−7A/cm2, showing excellent corrosion resistance.