材料科学
电容感应
电容
灵敏度(控制系统)
压力传感器
图层(电子)
电极
光电子学
声学
炭黑
频道(广播)
电磁屏蔽
电子工程
电气工程
复合材料
纳米技术
机械工程
工程类
天然橡胶
化学
物理化学
物理
作者
Zhitong Zhang,Junshi Li,Bocheng Yu,Dong Lan Huang,Qining Wang,Zhihong Li
标识
DOI:10.1109/mems51670.2022.9699612
摘要
In this paper, we proposed a flexible and wearable sensor integrating an annular interdigital electrode and a carbon black-PDMS sensitive film with micro-pyramid array. The device has two shielding layers and a sensing layer, which are fabricated by the flexible PCB process to realize low-cost and rapid manufacturing. The proposed annular interdigital structure and the shielding layer significantly improves the capacitance value and sensing sensitivity compared with the conventional rectangular interdigital structure. The sensitive film using carbon black (CB)-PDMS hybrid material greatly increases the sensitivity of the sensor as well, resulting from higher conductivity of the CB. Furthermore, we have developed a multi-channel acquisition system for capacitive sensors array, which realizes multi-channel simultaneous sampling. The FAICS demonstrates a piecewise linear pressure sensing characteristics, and can realize stable proximity and pressure sensing, as well as the functions of effective touch sensing, sliding gesture recognition, and pressure distribution test.
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